Plasma Deposition PVD Vacuum Coating Machine Chemical Vapor Deposition Film Coating System

Plasma Deposition PVD Vacuum Coating Machine Chemical Vapor Deposition Film Coating System

plasma deposition pvd vacuum coating machine CZPT vapor deposition film coating program


Introduction of PECVD coater:

CY-PECVD-450 chemical vapor deposition adopts plasma improved chemical vapor deposition engineering, which can use higher-power plasma to market the reaction approach, efficiently enhance the response pace and lessen the response temperature.

It is suited for depositing skinny films of silicon nitride, amorphous silicon and microcrystalline silicon on diverse substrates this kind of as optical glass, silicon, quartz and stainless steel. It has excellent movie-forming quality, much less pinholes and is not straightforward to crack. It is ideal for the preparation of amorphous silicon and microcrystalline silicon skinny film solar cell gadgets. It can be widely employed in the scientific investigation and small batch preparing of skinny movie supplies in Schools and universities and scientific research institutes.

CZPT parameters of PECVD coater:



Vacuum chamber

entrance opening door,φ300mm X 300mm,stainless steel

viewing window:φ100mm with baffle

Vacuum pump established

Entrance stage pump: rotary vane pump pumping speed is one.1L/s

Secondary pump: Turbo molecular pump pumping velocity 600L/s

Restricting vacuum


104Pa(Inside thirty minutes)


.133~133Pa,altered according to the method

RF power

13.56MHz,500W (automatch)

Flow control

 mass flowmeter(default Ar,~200sccm)


1100mm x 800mm x1100mm


Element photos of PECVD coater:

Started in 2005, HangZhou CY CZPT CZPT Co., Ltd. is a business specializing in the improvement and generation of laboratory technology research products. The goods are mixed, pressed, burned, cut, floor, polished, coated, analytical products and relevant consumables. CZPT include laboratory sintering gear, coating tools and so on. At existing, it has been exported to twenty five nations and areas these kinds of as the CZPT States, CZPTe, and CZPT Asia, and has been well acquired by a variety of scientific research models.

We have a experienced engineering research and improvement group, the number of professionals is 33, the company has a hundred and fifty folks, a lot more than five hundred square meters of business office area, the manufacturing facility addresses an area of about 1,five hundred square meters located in HangZhou High-tech Zone CZPTtronic CZPT Park. The products are largely positioned in the research industry, serving scientific analysis in the labs of universities and faculties, and can also personalize items according to your requirements.

Q. Are you a producer or a buying and selling company?

A. We are specialist laboratory instrument companies, have their possess design and style group and factory, have mature technological expertise, and can guarantee the good quality of goods and the best value.

Q. How is your company’s item after-income provider system?

A. The merchandise guarantee time period is twelve months, we can offer lifetime servicing. We have professional pre-product sales and right after-sales departments that can respond to you inside 24 hours to solve any specialized troubles.

Q. How prolonged is your shipping time? If I want to customize the instrument, how prolonged does it consider?

A.1. If the items are in inventory, it is five-10 times. 2. We can give CZPT providers for our clients. It normally requires 30-sixty days based on the specs of the custom made instrument.

Q. Our country’s energy source and plug are distinct. How do you solve it?

A. We can supply a transformer and plug according to your nearby requirements in accordance to the energy plug of various international locations.

Q. How to spend?

A.T / T, L / C, D / P, and many others., it is advisable to use Alibaba CZPT Assure.

Q. How is the package of products? Delivery techniques? Common export fumigation indication picket box packaging two. Categorical, air, sea shipping and delivery in accordance to buyer needs, find the most appropriate way.

More concerns, remember to speak to consumer services

Plasma Deposition PVD Vacuum Coating Machine Chemical Vapor Deposition Film Coating System